Planning for the Semiconductor Manufacturer of the Future

Introduction Texas Instruments (TI) is currently contracted bY the Air Force Wright Laboratory and the Defense Advanced Research Projects Agency (DARPA) to develop the next generation flexible semiconductor wafer fabrication system called Microelectronics Manufacturing Science & Technology (MMST). Several revolutionary concepts are being pioneered on MMST including new single-wafer rapid thermal processes, in-situ sensors, cluster equipment, and advanced Computer Integrated Manufacturing (CIM) software. The objective of the project is to develop a manufacturing system capable of achieving an order of magnitude improvement in almost all aspects of wafer fabrication [1]. TI was awarded the contract in October, 1988, and will complete development with a fabrication facility demonstration in April, 1993. An important part of MMST is development of the CIM environment responsible for coordinating all parts of the system. The CIM architecture being developed is based on a distributed object oriented framework made of several cooperating subsystems. The software subsystems include: Process Control for dynamic control of factory processes; Modular Processing System for controlling the processing equipment; Generic Equipment Model which provides an interface between processing equipment and the rest of the factory; Specification System which maintains factory documents and product specifications; Simulator for modelling the factory for analysis purposes; Scheduler for scheduling work on the factory floor; and the Planner for planning and monitoring of orders within the factory. This paper first outlines the division of responsibility between the Planner, Scheduler, and Simulator subsystems. It then describes the approach to incremental planning and the way in which uncertainty is modelled within the plan representation. Finally, current status and initial results are described.